ABSTRACT: In this talk we describe design, modelling, fabrication and control of a number of high-precision mechatronic systems and discuss their applications in imaging and manipulation from micro to nanoscales. While most of the talk will be devoted to high-speed atomic force microscopy for investigation of dynamic phenomena, we will describe in some detail emerging mechatronic systems such as force sensors, active tweezers and nanopositioners. We will show how MEMS fabrication technology can be used to realize alternative solutions to traditional mechanisms for these systems. We will describe innovative sensing and actuation technologies that can be incorporated into each MEMS device and will discuss the resulting control system design problems.

BIOSKETCH: Reza Moheimani currently holds the James Von Ehr Distinguished Chair in Science and Technology in Department of Systems Engineering at the University of Texas at Dallas, with appointments in Electrical and Computer Engineering Department and Mechanical Engineering Department. He is also an Adjunct Professor at the University of Newcastle, Australia. His current research interests include ultrahigh-precision mechatronic systems, with particular emphasis on dynamics and control at the nanometer scale, including applications of control and estimation in nanopositioning systems for high-speed scanning probe microscopy and nanomanufacturing, modeling and control of microcantilever-based devices, control of microactuators in microelectromechanical systems, and design, modeling and control of micromachined nanopositioners for on-chip scanning probe microscopy and atomically precise lithography.

Dr. Moheimani is a Fellow of IEEE, IFAC and the Institute of Physics, U.K. His research has been recognized with a number of awards, including IFAC Nathaniel B. Nichols Medal (2014), IFAC Mechatronic Systems Award (2013), IEEE Control Systems Technology Award (2009), IEEE Transactions on Control Systems Technology Outstanding Paper Award (2007) and several best paper awards in various conferences. He is Editor-in-Chief of Mechatronics and has served on the editorial boards of a number of other journals, including IEEE Transactions on Mechatronics, IEEE Transactions on Control Systems Technology, and Control Engineering Practice. He chaired the IFAC Technical Committee on Mechatronic Systems 2011-2017.